NREL (National Renewable Energy Laboratory) Spin on dopant process for solar cell

Process author/customer Benjamin Lee at NREL

1. This is a silicon single-junction solar cell.

2. The purpose of the dopants is for doping the p- and n-regions of the solar cell. We are using n-type Si wafers, so the p-doping is for the emitter, and the n-doping is for n++ contact to the base.

3. We are using the SOG as a carrier of the desired dopants.

4. Typical thicknesses are achieved at 2000-4000 rpm spin speed.